item |
part |
specification |
Overall size and layout of the equipment |
Device layout |
L type |
length |
≤2700mm |
width |
≤1600mm |
height |
≤1800mm |
Part order |
outer quartz tube-filter-Main valve-cold trap-Molecular pump |
quartz tube |
size |
OD130mm,Length2500mm,Thickness5mm |
connection |
Recessed,Groove height>5mm |
sealing falnges & chamber |
material |
bright stainless stee tube ( SUS 304 ) |
protection system |
Filter |
Single layer metal mesh |
Easy to disassemble,clean and maintain |
Cold trap |
Vacuum compartment type cold trap design |
Easy to disassemble,clean and maintain(hand can reach into the cold trap) |
Stainless steel / polished inside & outside |
Single outer diameter180-260mm |
Equipment base |
Equipment base, body material |
Adopt the square tube skeleton base, attached the movable wheel and the horizontal adjustment foot at the bottom, stainless steel as the countertop.( SUS 304 ) |
base height(below heating body) |
≤ 800mm |
base panel |
Easy to remove cover plate, cold plate spray |
Thermal field |
furnace body |
6 sections above and below, 12 points to detect temperature |
heating zone=200+200+400+200+300+200mm |
interval section= 10mm |
distance between Heating furnace side shell and outer tube connection>100mm |
temp. |
max temp software temp control=600°C, |
max. temp. of hardware>800°C |
Power control module |
40A |
Warming program module |
Data can be output, touch screen set temperature program |
Furnace brake system |
Furnace body switch |
Manually open |
Human touch switch |
Physical control switch |
cooling system |
Cooling fan |
High temperature resistant material |
Water and electrical requirements |
electricity |
voltage 380V,power 22Kw |
water |
5L/min |
gas |
气Pneumatic valve need N2,pressure0.6Mpa |
Human machine hardware system |
touch screen |
10.4inch |
Software control |
function |
Touch screen can add screen lock to prevent accidental touch |
Integrate the operation of each pneumatic valve of the equipment, the switch of each component, and the setting of the heating system |
automatic mode and manual mode |
Main pump |
Molecular pump |
FF250/1600G, pumping rate1600L/s |
High vacuum pumping line |
Main pumping line |
The vacuum pumping end uses a molecular pump with a diameter of 100mm to directly connect to ensure the high vacuum in the experiment. A plate valve is added in the middle of the diameter straight pipe. |
Foreline pump |
mechanical pump |
pumping rate30m³/h |
Low vacuum pumping line |
side pumping line |
The ends of the flapper valve are added with a 16mm diameter thin tube bypass branch to prevent the pumping speed from affecting the direction of molecular diffusion in the initial vacuum, resulting in uneven material. |
vacuum degree |
Low vacuum pump exhaust rate |
2x10^-2torr within 20min in main chamber |
High vacuum pump exhaust rate |
5x10^-6torr within 20min in main chamber after turining on Molecular pump |
Pressure test |
After reaching the ultimate vacuum (5x10^-6torr), close all valves, less than 2x10^-2torr after 30min |